13.56Mh 5L 150W plasma cleaner with Stainless steel chamber

13.56Mh 5L 150W plasma cleaner with Stainless steel chamber

The plasma cleaner uses the properties of these active components to treat the surface of the sample, so as to achieve the purpose of cleaning, coating, etc.

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Plasma cleaner is a new high-tech technology that uses plasma to achieve effects that cannot be achieved by conventional cleaning methods. Plasma is a state of matter, also called the fourth state of matter, and it is not the common three states of solid, liquid and gas. Apply enough energy to the gas to ionize and become a plasma state. The "active" components of plasma include: ions, electrons, atoms, active groups, excited nuclides (metastable states), photons, etc. The plasma cleaner uses the properties of these active components to treat the surface of the sample, so as to achieve the purpose of cleaning, coating, etc.

5L Plasma Cleaner Features:

The chamber has a large usable area, uniform glowing, and can clean 6-inch silicon wafers.

5L Plasma Cleaner Technical Parameters:

product name	13.56Mh 5L plasma cleaner
Product number	CY-PC13.56M-5L-150SS
Cleaning the chamber	Chamber material	High purity quartz
Cleaning the chamber	Chamber size	Diameter 200 mm; Length 170 mm
RF power supply	Power supply features	The power supply is an all-solid-state RF power supply, and adopts a high-stability and high-reliability power amplifier module and a DC module, which effectively ensures the RF power output of the power supply. High quality electronic components are used to ensure the reliability of the products.
	Power advantage	● Long time normal operation ● Simple and flexible operation ● High power supply efficiency and low heat generation ●With perfect reflection power protection function
	RF power	0~100W continuously adjustable / 0~150W continuously adjustable
	Signal frequency	13.56MHz ±0.005%
	Reflected power	≤100W
	Power stability	±0.1%
	RF connector	N type connector
	Machine efficiency	≥75%
	Harmonic component	≤-50 dBc
	cooling method	Forced air cooling
Gas measurement	Measuring unit	Float flowmeter
	Gas channel	Two channels
	A channel range	10～100ml
	B channel range	16～160ml
Vacuum	Vacuum measurement	Digital vacuum gauge (resistance gauge)
	Vacuum pump	Two-stage rotary vane vacuum pump
	Motor speed	50 Hz: 1440; 60 Hz: 1720
	Pumping rate	50 Hz: 240 L/Min; 60 Hz: 288 L/Min
	Vacuum range	0.1Pa～10000Pa
	Ultimate vacuum	0.5Pa
	Motor noise	≤56dB
	Pipe interface	Gas inlet: KF16; exhaust port KF16.
	Connecting pipe	KF16 vacuum bellows
	Vacuum valve	KF16 ball valve
	Motor Power	400W
Other	Power supply	AC220V 50/60Hz
	Total power	550W/600W
	Operating temperature	-10℃ -- 40℃
	Working vacuum	≤40Pa
	Overall size	600mm×500mm×560mm
	Total Weight	80kg (including packaging)

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