Four sources high vacuum thermal evaporation coater
The equipment is equipped with four sets of tungsten boat evaporation sources and water-cooled copper electrode. Each evaporation source supports a large current of 100A and a heating temperature of 1800℃. It can realize multi-layer coating or mixed coating of multiple materials.
This equipment is a four-source high-vacuum evaporation coater. The equipment adopts a front-opening door vacuum chamber design. In addition, the chamber is increased to 500mm. The distance between the sample stage and the evaporation source has a larger adjustment range, which can adapt to various evaporation needs. It avoids the sample being damaged by the high temperature of the evaporation source.
The chamber adopts an top sample stage, the sample stage can be rotated, heated and lifted, and all operations can be integrated and controlled through the touch screen. The equipment vacuum system is a two-stage vacuum system composed of a two-stage rotary vane pump and a turbo molecular pump, which can provide a clean and oil-free high vacuum environment. The equipment is equipped with a pneumatic valve system. Through the automatic control of the operating system, the user can perform operations such as one-button vacuum pumping, non-stop take out and place sample, and complete shutdown from the touch screen.
The equipment is equipped with four sets of tungsten boat evaporation sources and water-cooled copper electrode. Each evaporation source supports a large current of 100A and a heating temperature of 1800℃. It can realize multi-layer coating or mixed coating of multiple materials.
Technical parameters:
Four source high vacuum evaporation coating equipment
Sample stage
Size
Maximum support φ150mm samples
Height
Adjustable up and down 140mm
Evaporation source
Quantity
Tungsten Boat x4
Vacuum chamber
Chamber size
φ325mm x 510mm
Observation window
Front φ100mm with shading plate
Chamber material
304 stainless steel
Open method
Front door opening
Film thickness control
Crystal oscillator type film thickness measuring instrument, optional multi-channel film thickness controller
Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will periodically improve and modify the website information, without prior notice, please understand.
